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國際污染控制學術(shù)論文集目錄(第十六屆)

發(fā)表時間:2018-06-22 09:41:32瀏覽量:


國際污染控制學術(shù)論文集目錄(第十六屆) 


Table of Contents, Proceedings on Contamination Control Issued During the 16th ICCCS Conference (1)

污染控制

Contamination Control

手段Ⅰ

Facilities I 


1、 地板風速測量來檢驗潔凈室氣流的平行性

    Clean Space Airflow Parallelism Verification from Floor Velocity 

    Measurements

    米切爾.居 Michael D. Jue 


2、 用通風效率評估法對"前開式潔凈容器"(FOUP)系統(tǒng)的潔凈室內(nèi)氣流特性進行

    的研究

    A Study on the Airflow Performance in Cleanrooms with "FOUP" Systems 

    by Using an Evaluation Method for Ventilation Efficiency

    高橋尾谷Yoshihide Suwa


3、 開發(fā)簡化步驟,測量室內(nèi)空氣分布

    Development of Simplified Measuring Procedure for Indoor Age-of -Air     Distributions

    佐藤多一、高橋尾谷、藤本壯一 Satoru Doi, Yoshihide Suwa, and Shigeru 

     Sakamoto


4、 國家核聚變研究設施粒子束通道及動力系統(tǒng)的潔凈建造約定

    Clean Construction Protocol for the National Ignition Facility 

    Beampath and Utilities

    斯坦利.索馬,艾明.斯道爾,大衛(wèi).萬德文,羅伯特.普瑞茅,蘇.史帝文森 

     Stanley C. Sommer, Irving F.Stowers, David E. Van Doren, Robert A. 

     Predmore, and Sue A. Stephenson


5、 潔凈室氣流層控制

    Cleanroom Airflow Laminarity Controls

    喬治o汀諾雷 George Ting-Kwo Lei




潔凈室運行Ⅰ

Cleanroom Operations I



6、 使用小型NO2儀表分析潔凈室空氣

    Analysis in Clean Room Air Using Small NO2 Meter

    古村合志、上原敬二、筱冢功、節(jié)部園實、鶴信二、佐佐木茂園、數(shù)本則園     Atsushi Komura,Keiji Uehara, Isao Shinozuka, Sonomi Kushibe,

    Shinji Tsuru, Shigekuni Sasaki, and Norikuni Yabumoto 

 

 

 

  

7、 對排放氣流時間變化的評估

    Estimate of Time Change of the Gas Emission Flux

    田村啟、藤井秀二、鉤直木 Hajime Tamura, Shuji Fujii, and Naoki Kagi 


8、 開發(fā)超聲提取法評估靜電強化顆粒沉淀式晶片存儲箱的潔凈度

    Development of an Ultrasonic Extraction Method of Evaluate the 

    Cleanliness of Wafer Storage Boxes Prepared by Electrostatically 

    Enhanced Particle Deposition

    王華平,柯克.米克森,劉本加明 Huaping Wang, Kirk Mikkelsen, and 

    Benjamin Y. H. Liu 


9、 高濃度顆粒環(huán)境下的取樣

    Sampling High Concentration Ambient Particles

    納康.特培王,納特.瓦瑞斯,蘇加.蘇克邁,阿拉克.李 Nakorn Tippayawong,

    Nat Vorayos, Sujja Suksamai, and Aleck Lee


懸浮分子污染 Ⅰ

Airborne Molecular Contamination I


10、使用溫度壓力箱對衛(wèi)星部件進行氣體釋放試驗

    Outgassing Experiment on a Satellite Component Using Bake-Out Chamber

    樸貴文、蔡索文、何均索、李醒宏、李東金、李星漢 Guee-Won Moon, Seok-

    Weon Choi,Hee-Jun Seo, Sang-Hoon Lee, Dong-Jin Lee, and Sang-Seol Lee


11、潔凈室空氣中酸性和堿性化合物在硅晶片表面的沾附特性 

    Sticking Behavior of Acidic and Basic Compounds in Clean Room Air 

    onto Silicon Wafer Surface

    桃來加奈、武田菊男、飯川伶子、尾川紀子、今井諄、藤本武利

    Kana Momoji, Kikuo Takeda,Reiko Likawa, Noriko Ohkawa, Makoto Imai, 

    and Taketoshi Fujimoto


12、建筑材料以其內(nèi)部特性散發(fā)揮發(fā)性有機化合物的機理

    VOC Emission Mechanisms from Building Materials by Considering 

    International Behavior

    鉤直木、藤井秀二、田村啟 Naoki Kagi, Shuji Fujii, and Hajime Tamura


13、以分子模擬化學污染物的吸收特性

    Adsorption Behavior of Chemical Contaminants by Molecular Simulation

    悟堂正純、武志全司、友成睦地、三浦國尾、高見知志、久保百治、宮本明榮 

    Masazumi Godo,Takeshi Takatsuka, Mutsuya Tomonari, Kunio Miura,

    Seiichi Takami, Momoji Kubo, andAkira Miyamoto


14、使用溫控石英微量計(TQCM)對潔凈室的分子污染進行長期測量

    Long-Term Measurement of Molecular Contamination in a Cleanroom Using

    a Temperature-Controlled Quartz Crystal Microbalance (TQCM)

    威廉姆.米切爾 William J. Moitchell    

 

  

靜電排放

Electrostatic Discharge


15、靜電除塵系統(tǒng)在潔凈室、醫(yī)院及醫(yī)藥制造中的應用

    The Use of Electrostatic Dust Collection Systems in Cleanrooms, 

    Hospitals, and Pharmaceutical Manufacturing

    斯塔特.霍尼格 Stuart A. Hoenig


16、在使用電場及電暈放電的條件下用軟X射線輻射有效地收集超細顆粒

    Effective Collection of Ultrafine Particles with Soft X-Ray 

    Irradiation Under Applied Electric Field and /or Corona Discharge

    并木紀和、尾谷芳野、普拉木德-庫卡尼、普拉締姆-比斯瓦斯 Norikazu 

    Namiki, Yoshio Otani,Pramod Kulkarni, and Pratim Biswas 


17、交流電場中帶電的亞微顆粒的聚集特性

    Coagulation Behavior of Charged Submicron Particles in Alternating 

    Electric Field

    羅光楚、歐苗德Kwang-Chul Noh and Myung-Do Oh



懸浮分子污染Ⅱ

Airborne Molecular Contamination II


18、確定室內(nèi)空氣甲醛含量的新取樣管的開發(fā)

    Development of New Sampling Tube for the Determination of

    Formaldehyde in Indoor Air

    長谷川瞻見、梁本隆司、杉原小市、北坂葛山、村上孝紀、內(nèi)原勇紀、

    竹田菊男 Ayumi Hasegawa, Takashi Harimoto, Koichi Sugihara, Kazuya Kitasaka, Takayuki Murakami,Yuki Uchihara, and Kikuo Takeda


19、懸浮分子污染的研究、控制及監(jiān)測在半導體與軟盤驅(qū)動器制造中的實際應用

    Practical Applications of Assessment, Control, and Monitoring of AMC

    in Semiconductor and Disk Drive Manufacturing

    奧理斯托夫.穆勒,威廉姆.瓊斯,漢特.奈特 Christopher O. Muller,

    William B. Jones, and J. Hunt Knight II


20、懸浮分子污染控制中過濾系統(tǒng)技術(shù)參數(shù)的效果

    The Effect of Filter System Technical Parameters on Airborne 

    Molecular Contamination Control

    布魯克斯 Matthew C. Middlebrooks

 

手段Ⅱ

Facilities II 

21、潔凈室環(huán)境系統(tǒng)的能源效率

    Energy Performance of Cleanroom Environmental Systems

    徐騰芳,威廉姆.斯魯?shù)?Tengfang Xu and William Tschudi


22、隔離裝置表面及空氣中殘余過氧化氫的生物監(jiān)測培養(yǎng)基

    Culture Media for Microbiological Monitoring in Isolators with

    Residual Hydrogen Peroxide on Surfaces and in Air

    杰根洪,馬瑞貝克斯,伊龍諾.西普,皮恰.文斯 Juergen Horn,

    Maria Backes, Eleonor-C. Schepp, and Petra Wenz


人員污染

Human-Sourced Contamination


23、現(xiàn)代潔凈室服裝系統(tǒng);潔凈室中人作為懸浮顆粒污染源的新數(shù)據(jù)

    Modern Cleanroom Clothing Systems; New Data on People as 

    Contamination Source in Clean Rooms with Regard to Airborne

    Particulates

    貝特.瑞穆勒,本特.龍維斯特 Berit Reinmuller and Bengt Ljungqvist


24、提高潔凈室服裝的效率

    Enhancing the Efficiency of Cleanroom Apparel

    羅伯特-斯派特 Robert Spector


25、顆粒潔凈度認證系統(tǒng)

    The Particle Cleanliness Validation System

    愛英.斯托斯,達拉斯.瑞維扎 Irving F. Stowers and Douglas L. Ravizza



應用Ⅱ:ISO/TC 209

Applications II: ISO/TC 209


26、使用非連續(xù)顆粒計數(shù)對安裝好的高效過濾器進行泄漏測試--實用性的調(diào)查

    Installed HEPA Filter Leak Testing by Using Discrete Particle 

    Counting-Investigation into Practicability

    洛塔o格爾,德克o斯坦尼斯切斯基 Lothar Gail and Dirk Stanischewski

過濾器的改進

Filter Update


27、聚α烯(PAO)氣溶膠對聚四氟乙烯介質(zhì)高效過濾器(試驗)壓差的作用效果

    The Effect of PAO Aerosol Challenge on the Differential Pressure of 

    a Gore-Tex Media HEPA (Experimental) Filter

    羅納德.羅伯特,代夫.阿那德 Ronald Roberts and Dave Arnold


28、帶高效過濾器的小型空氣潔凈器現(xiàn)場維修的消毒方法

    The Sterilizing Method for the Small Air Cleaner with HEPA Filter,

    When the Maintenance Is at the Site

    安迪.瓦特那勃,塔卡由基.塔那卡 Andy Watanabe and Takayuki Tanaka


29、使用晶片暴露方式及試驗性風機過濾器單元評估化學過濾器

    Evaluation of Chemical Filter Using Wafer Exposure Method and 

    Experimental FFU

    野中立夫、武田久男、飯川理行、多伊良俊一、藤本竹利

    Tatsuo Nonaka, Kikuo Takeda,Reiko Likawa, Toshikazu Taira, and Taketoshi Fujimoto


30、清除有機污染的陶瓷化學過濾器

    Ceramic Chemical Filter for Removal of Organic Contaminants

    坂田壯一郎、高橋秀遠、佐藤克三、古村秀遠

    Soichiro Sakata, Hideto Takahashi, Katsumi Sato, and Atsushi Takahashi


大學文章

University Presentation


31、半導體制造設施建設中的資源要求

    Resource Requirements for Construction of a Semiconductor

    Manufacturing Facility

    安諾哈夫o巴格瓦,貝爾克茲.鄂茲特米爾,阿蘭.恰西 

    Anubhav Bhargava, Balkiz Oztemir, and Allan D. Chasey


32、先進技術(shù)環(huán)境的規(guī)范、標準及符合規(guī)范的替代模式

    Codes and Standards and Alternate Code Compliance Model for Advanced 

    Technology Environments

    杰尼弗.瓊斯,阿蘭.洽西 

    Jennifer A. Jones and Allan D. Chasey


33、半導體設施程式化,減少設施建設費

    Benchmarking Semiconductor Facilities to Reduce Facility 

    Construction Costs

    杰夫o瓊斯,沙羅克,阿蘭洽西 

    Jeff Jones, Shawn O'Rourke, and Allan D. Chasey

ISO14644-1及-2與FED-STD-209E對比

Comparison of ISO14644-1 and -2 and FED-STD-209E 

34、通常對ISO14644-1及-2與FED-STD-209之間差別的誤解--對不了解的事會

    付出代價

    Common Misconceptions About the Differences Between ISO 14644-1 

    and -2 and FED-STD-209E-What You Don't Know Could Cost You

    羅伯特.米克 Robert Mielke


潔凈室運行Ⅱ

Cleanroom Operations II



35、關(guān)于懸浮顆粒計數(shù)器校準的討論

    Discussions About Calibration of Airborne Particle Counters

    劉俊杰,劉斌,朱能,王俊山 Junjie Liu, Bin Liu, Neng Zhu, and 

    Junshan Wang


36、潔凈工作臺空氣流速的均勻性和湍流度研究

    Study on Air Velocity Uniformity and Turbulivity Under Clean Bench

    劉俊杰,涂光備,馬久先,杜曉剛 Junjie Liu, Guangbei Tu, Jiuxian Ma, 

    and Xiaogang Du


37、醫(yī)藥業(yè)安全通風概念的風淋效率

    The Efficiency of Air Showers as a Safety Ventilation Concept in the 

    Pharmaceutical Industry

    拉斯,伊勃格,尤夫.庫格 Lars E. Ekberg and Ulf Kruger


38、乳膠手套過敏:摩托羅拉的經(jīng)驗

    Latex Glove Allergy: The Motorola Experience

    包勃.貝克 Bob Baker


39、潔凈室及防止生物擴散

    Cleanroom and Biocontainment 

    依米羅.莫埃 Emilio Moia


與污染控制相關(guān)的設計、測試及評估

Joint DTE/CC


內(nèi)部空氣質(zhì)量

Internal Air Quality


40、干燥空氣(環(huán)境)下自然氧化層在硅表面的生長

    Native Oxide Growth on a Silicon Surface Under a Dry Atmosphere

    上村哲,藤井正儀Satoshi Uemura and Masanori Fujii

41、過濾器編織材料穿透性研究

    Study on Permeability of Woven Filter Materials

    康永,張雨新,張忠國,孔新軍 Yong Kang, Yuxin Zhang, Zhongguo Zhang, 

    and Xinjun Kong


42、通風效率及測試方法的研究

    The Research About Ventilation Efficiency and Test Methods

    李津光,依德伍德.涂,涂光備 Jingguang Li, Edward Tu, and Guangbei Tu


43、影響通風室內(nèi)部濃度的因素分析

    The Analysis of Factors Affecting Concentration in the 

    Ventilation Room

    李津光,依德伍德.涂,涂光備 Jingguang Li, Wdward Tu, and Guangbei Tu


44、高效過濾器測試統(tǒng)計學上的顯著效率

    Statistically Significant Efficiency Testing of HEPA Filters

    王文立,菲利浦.文特斯 Wenli Wang and Philip J. Winters


設計、測試及評估 Design, Test & Evaluation


分析技術(shù)Ⅰ

Analysis Techniques I


45、以極端響應頻譜(ERS)及疲勞損傷頻譜(FDS)撰寫機械振動技術(shù)條件

    Writing a Mechanical Vibration Specification from ERS and FDS

    克瑞斯坦.拉蘭,米歇爾.保佑 Christian Lalanne and Michel Bozio


46、空氣波動造成的艙(氣)室側(cè)力近似值

    Approximation of Side Force Due to Aerodynamic Fluctuations on an 

    Airborne Store

    舍夫o浩斯通,魯林爾 Z. Sherf, P. Hopstone, and E. Lubliner


47、雙輪拖車拉桿的模態(tài)測量

    Modal Survey of Two-Wheeled Trailer Drawbar

    喬治.懷特 Geoge O. White


48、模態(tài)測量測試與振動評定測試:綜合方法

    Modal Survey Testing and Vibration Qualification Testing: The 

    Integrated Approach

    巴特.皮特斯,赫曼.萬.安沃爾,帕克.貴爾 Bart Peeters, Herman Van der 

    Auweraer, and Patrick Guillaume


49、動能導彈發(fā)射環(huán)境下惰性測量傳感器的振動隔絕

    Shock Isolation of Inertial Measurement Sensors Subjected to Kinetic 

    Energy Missile Launch Environments

    魯賽爾.戈恩爾,斯潘舍.哈德森 Russll S. Garner and Spencer L. Hudson

 

可靠性分析和測試

Reliability Analysis and Test 

50、熱聲聯(lián)合激勵下環(huán)境應力隔離頻譜模擬

    ESS Spectrum Tailoring with Combined Thermal and Acoustical 

    Excitation

    福朗科斯.拉夫爾,馬可.拉莫斯,夫瑞德瑞克.拉維爾 Francois Lafleur,

    Marc Thomas, and Frederic Laville


51、環(huán)境測試系統(tǒng)的新趨勢

    New Trends in Environmental Test Systems

    底特.豪斯 Dieter Haus


52、系統(tǒng)模擬及提高可靠性的故障樹狀分析

    Fault Tree Analysis for System Modeling and Reliability Growth 

    邁爾那.柯拉斯切 Milena Krasich 


53、另一種類型的故障源判定實例記載

    A Different Type of HALT Stimulus Case History

    喬治.漢德森,金柯爾 George Henderson and Kim Kral


54、自然環(huán)境下降低費用的全壽命測試

    Testing in Natural Environments for Total Ownership Cost Reduction

    羅格o威廉姆松 Roger L. Williamson


55、高加速應力隔離的實施步驟

    Implementation of the HASS Process

    吉爾伯特.巴斯汀 Gilbert Bastien


分析技術(shù)Ⅱ

Analysis Techniques II


56、隨機波型合成與脈沖計數(shù)

    Random Waveform Synthesis and Scaling

    漢斯o格容勃格 Hans S. Gruenberger


57、取樣率改變時振動響應頻譜的計算

    Calculation of the Shock Response Spectrum (SRS) with a Change in 

    Sampling Rate

    大衛(wèi).斯摩德 David O. Smallwood


58、多入多出(MIMO)隨機振動評定測試:算法及實際經(jīng)驗

    MIMO Random Vibration Qualification Testing: Algorithm and

    Practical Experience

    巴特.皮特及簡-德比爾 Bart Peeters and Jan Debille 

 

59、多激勵器測試應用:理論與實踐

    Multi-exciter Testing Application: Theory and Practice

    馬科恩.安德伍德 Marcos Underwood 


持續(xù)性--基礎與概念

Sustainability-Basic and Concepts


60、持續(xù)性--工業(yè)應用,選擇方案及市場機會

    Sustainability-Industrial Implementations, Options, and 

    Market Opportunities

    卡爾-夫德切吉根,赫爾馬-斯舒博特及托馬斯.赫斯 Karl-Friedrich Ziegahn,

    Hiltmar Schubert, and Thomas Hirth


61、瞄準持續(xù)性的新產(chǎn)品和新工藝

    New Products and Processes Aiming on Sustainability

    托馬斯.赫斯,赫爾馬-斯舒博特,卡爾-夫德切吉根 Thomas Hirth,

    Hiltmar Schubert, and Karl-Friedrich Ziegahn


62、持續(xù)性的獲得--如何彌補理念與實施間的差異

    Management of Subtainability-How to Overcome the Gap Between 

    Theoretical Concepts and Practical Implementation

    赫爾馬o斯舒博特,卡爾-夫德切吉根,托馬斯.赫斯 Hiltmar Schubert, 

    karl-Friedrich Ziegahn, and Thomas Hirth


63、合成木(包裝材料)樣塊(性能)測試

    Investigation on Composite Wood Blocks

    迪特.格勃爾 Dieter Greubel



溫度測試,數(shù)據(jù)與分析

Thermal Test, Date, and Analysis


64、以為是穩(wěn)定的?有關(guān)MIL-STD-810E圖501.3-1的新考慮

    Think It's Stabilized? New Considerations About Figure 501.3-1 of

    MIL-STD-810E

    馬科斯.都邁林,尤利.格羅森,托馬斯.拉德拉切 Markus Dumelin,

    Ueli Grossen, and Thomas Laederach


測試方法Ⅰ

Test Methods I


65、電子設備真實的或模擬的熱沖擊效果

    Effects of Real or Simulated Pyroshocks on Electronic Equipment

    亨瑞o格茲庫維克 Henri Grzeskowiak

  

66、數(shù)字式損傷儀記錄的飛行數(shù)據(jù)一瞥

    A Quick Look at Flight Data from a Digital Damage Dosimeter

    大衛(wèi)o本扎克,旦森.布朗,安杰拉.特格 David Banaszak, Dansen Brown, 

    and Angela Trego 

67、測試一致性的幾個問題

    Several Questions of Consistency in Our Testing

    茲夫.舍夫及菲利浦.蒙斯東 Zeev Sherf and Philip Hopstone


68、能源概算誤差與參數(shù)的不準確性之間的關(guān)系

    The relationship Between the Variance of Energy Estimates and the 

    Uncertainty Parameter

    大衛(wèi).斯馬烏德 David O.Smallwood


摸擬測試技術(shù)

Modeling/Simulation Test Technologies


69、大型復雜動力系統(tǒng)結(jié)構(gòu)模式的概率數(shù)字分析

    Probabilistic Numerical Analysis of Large, Complex, Structural 

    Dynamic System Models

    安杰.爾賓那和托馬斯.帕茲 Angel Urbina and Thomas L.Paez


70、對美國宇航局火星開拓者空間飛行器因發(fā)射聲音負載造成的高頻振動響應的能

    源統(tǒng)計分析預測及認證

    Prediction and Validation of High Frequency Vibration Responses of 

    NASA Mars Pathfinder Spacecraft Due to Acoustic Launch Load 

    Using Statistical Energy Analysis 

    霍-金 黃 Ho-Jin Hwang


測試設施

Test Facilities


71、介紹韓國宇航研究所使用的高強度聲音測試設施

    Introduction to a High-Intensity Acoustic Test Facility at Korea 

    Aerospace Research Inwstitute

    金永凱,金洪北,樸宋木,吳星現(xiàn),李松漢 Youngkey K.Kim, Hong-Bae Kim, 

    Sang-Mu Moon,Sung-Hyun Woo, and Sang-Seol Lee


72、振動/沖擊測試設施計劃

    Planning Your Vibration/Shock Test Facility

    威恩.圖汀 Wayne Tustin

 

 

測試方法Ⅱ

Test MethodsⅡ

73、造成機載系統(tǒng)的真正壽命與試驗室振動測試間差異的因素

    What Can Make the Difference Between the Real Life of an Airborne

    System and a Laboratory Vibration Test

    茲夫.舍夫及菲利浦.豪斯東 Zeev Sherg and Philip Hopstone


74、電子硬件的摸擬改進測試

    Simulation Improved Testing of Electronic Hardware

    米謝爾.奧斯曼 Michael Osterman


75、檢驗傳統(tǒng)的振動機器造成的振動與電動振動機造成的振動之間的功能性差別

    Examination of Functional Differences Between Shocks Delivered by 

    Conventional Shock Machines and Shocks Delivered by Electrodynamic

    Shakers

    大衛(wèi).格邦斯 David Gibbons


軍事項目中使用商業(yè)產(chǎn)品(COTS)的經(jīng)驗

COTS Experience on Military Programs


76、保證在空軍系統(tǒng)中成功地使用商業(yè)產(chǎn)品

    Ensuring Successful Implementation of Commercial Items in Air

    Force Systems

    肯尼斯.布朗 Kenneth M.Brown

 

第十六屆國際污染控制學術(shù)論文集目錄 (一)


Table of Contents, Proceedings on Contamination Control Issued During the 16th ICCCS Conference (1)

污染控制

Contamination Control

手段Ⅰ

Facilities I 


1、 地板風速測量來檢驗潔凈室氣流的平行性

    Clean Space Airflow Parallelism Verification from Floor Velocity 

    Measurements

    米切爾.居 Michael D. Jue 


2、 用通風效率評估法對"前開式潔凈容器"(FOUP)系統(tǒng)的潔凈室內(nèi)氣流特性進行

    的研究

    A Study on the Airflow Performance in Cleanrooms with "FOUP" Systems 

    by Using an Evaluation Method for Ventilation Efficiency

    高橋尾谷Yoshihide Suwa


3、 開發(fā)簡化步驟,測量室內(nèi)空氣分布

    Development of Simplified Measuring Procedure for Indoor Age-of -Air     Distributions

    佐藤多一、高橋尾谷、藤本壯一 Satoru Doi, Yoshihide Suwa, and Shigeru 

     Sakamoto


4、 國家核聚變研究設施粒子束通道及動力系統(tǒng)的潔凈建造約定

    Clean Construction Protocol for the National Ignition Facility 

    Beampath and Utilities

    斯坦利.索馬,艾明.斯道爾,大衛(wèi).萬德文,羅伯特.普瑞茅,蘇.史帝文森 

     Stanley C. Sommer, Irving F.Stowers, David E. Van Doren, Robert A. 

     Predmore, and Sue A. Stephenson


5、 潔凈室氣流層控制

    Cleanroom Airflow Laminarity Controls

    喬治o汀諾雷 George Ting-Kwo Lei




潔凈室運行Ⅰ

Cleanroom Operations I



6、 使用小型NO2儀表分析潔凈室空氣

    Analysis in Clean Room Air Using Small NO2 Meter

    古村合志、上原敬二、筱冢功、節(jié)部園實、鶴信二、佐佐木茂園、數(shù)本則園     Atsushi Komura,Keiji Uehara, Isao Shinozuka, Sonomi Kushibe,

    Shinji Tsuru, Shigekuni Sasaki, and Norikuni Yabumoto 

 

 

 

  

7、 對排放氣流時間變化的評估

    Estimate of Time Change of the Gas Emission Flux

    田村啟、藤井秀二、鉤直木 Hajime Tamura, Shuji Fujii, and Naoki Kagi 


8、 開發(fā)超聲提取法評估靜電強化顆粒沉淀式晶片存儲箱的潔凈度

    Development of an Ultrasonic Extraction Method of Evaluate the 

    Cleanliness of Wafer Storage Boxes Prepared by Electrostatically 

    Enhanced Particle Deposition

    王華平,柯克.米克森,劉本加明 Huaping Wang, Kirk Mikkelsen, and 

    Benjamin Y. H. Liu 


9、 高濃度顆粒環(huán)境下的取樣

    Sampling High Concentration Ambient Particles

    納康.特培王,納特.瓦瑞斯,蘇加.蘇克邁,阿拉克.李 Nakorn Tippayawong,

    Nat Vorayos, Sujja Suksamai, and Aleck Lee


懸浮分子污染 Ⅰ

Airborne Molecular Contamination I


10、使用溫度壓力箱對衛(wèi)星部件進行氣體釋放試驗

    Outgassing Experiment on a Satellite Component Using Bake-Out Chamber

    樸貴文、蔡索文、何均索、李醒宏、李東金、李星漢 Guee-Won Moon, Seok-

    Weon Choi,Hee-Jun Seo, Sang-Hoon Lee, Dong-Jin Lee, and Sang-Seol Lee


11、潔凈室空氣中酸性和堿性化合物在硅晶片表面的沾附特性 

    Sticking Behavior of Acidic and Basic Compounds in Clean Room Air 

    onto Silicon Wafer Surface

    桃來加奈、武田菊男、飯川伶子、尾川紀子、今井諄、藤本武利

    Kana Momoji, Kikuo Takeda,Reiko Likawa, Noriko Ohkawa, Makoto Imai, 

    and Taketoshi Fujimoto


12、建筑材料以其內(nèi)部特性散發(fā)揮發(fā)性有機化合物的機理

    VOC Emission Mechanisms from Building Materials by Considering 

    International Behavior

    鉤直木、藤井秀二、田村啟 Naoki Kagi, Shuji Fujii, and Hajime Tamura


13、以分子模擬化學污染物的吸收特性

    Adsorption Behavior of Chemical Contaminants by Molecular Simulation

    悟堂正純、武志全司、友成睦地、三浦國尾、高見知志、久保百治、宮本明榮 

    Masazumi Godo,Takeshi Takatsuka, Mutsuya Tomonari, Kunio Miura,

    Seiichi Takami, Momoji Kubo, andAkira Miyamoto


14、使用溫控石英微量計(TQCM)對潔凈室的分子污染進行長期測量

    Long-Term Measurement of Molecular Contamination in a Cleanroom Using

    a Temperature-Controlled Quartz Crystal Microbalance (TQCM)

    威廉姆.米切爾 William J. Moitchell    

 

  

靜電排放

Electrostatic Discharge


15、靜電除塵系統(tǒng)在潔凈室、醫(yī)院及醫(yī)藥制造中的應用

    The Use of Electrostatic Dust Collection Systems in Cleanrooms, 

    Hospitals, and Pharmaceutical Manufacturing

    斯塔特.霍尼格 Stuart A. Hoenig


16、在使用電場及電暈放電的條件下用軟X射線輻射有效地收集超細顆粒

    Effective Collection of Ultrafine Particles with Soft X-Ray 

    Irradiation Under Applied Electric Field and /or Corona Discharge

    并木紀和、尾谷芳野、普拉木德-庫卡尼、普拉締姆-比斯瓦斯 Norikazu 

    Namiki, Yoshio Otani,Pramod Kulkarni, and Pratim Biswas 


17、交流電場中帶電的亞微顆粒的聚集特性

    Coagulation Behavior of Charged Submicron Particles in Alternating 

    Electric Field

    羅光楚、歐苗德Kwang-Chul Noh and Myung-Do Oh



懸浮分子污染Ⅱ

Airborne Molecular Contamination II


18、確定室內(nèi)空氣甲醛含量的新取樣管的開發(fā)

    Development of New Sampling Tube for the Determination of

    Formaldehyde in Indoor Air

    長谷川瞻見、梁本隆司、杉原小市、北坂葛山、村上孝紀、內(nèi)原勇紀、

    竹田菊男 Ayumi Hasegawa, Takashi Harimoto, Koichi Sugihara, Kazuya Kitasaka, Takayuki Murakami,Yuki Uchihara, and Kikuo Takeda


19、懸浮分子污染的研究、控制及監(jiān)測在半導體與軟盤驅(qū)動器制造中的實際應用

    Practical Applications of Assessment, Control, and Monitoring of AMC

    in Semiconductor and Disk Drive Manufacturing

    奧理斯托夫.穆勒,威廉姆.瓊斯,漢特.奈特 Christopher O. Muller,

    William B. Jones, and J. Hunt Knight II


20、懸浮分子污染控制中過濾系統(tǒng)技術(shù)參數(shù)的效果

    The Effect of Filter System Technical Parameters on Airborne 

    Molecular Contamination Control

    布魯克斯 Matthew C. Middlebrooks

 

手段Ⅱ

Facilities II 

21、潔凈室環(huán)境系統(tǒng)的能源效率

    Energy Performance of Cleanroom Environmental Systems

    徐騰芳,威廉姆.斯魯?shù)?Tengfang Xu and William Tschudi


22、隔離裝置表面及空氣中殘余過氧化氫的生物監(jiān)測培養(yǎng)基

    Culture Media for Microbiological Monitoring in Isolators with

    Residual Hydrogen Peroxide on Surfaces and in Air

    杰根洪,馬瑞貝克斯,伊龍諾.西普,皮恰.文斯 Juergen Horn,

    Maria Backes, Eleonor-C. Schepp, and Petra Wenz


人員污染

Human-Sourced Contamination


23、現(xiàn)代潔凈室服裝系統(tǒng);潔凈室中人作為懸浮顆粒污染源的新數(shù)據(jù)

    Modern Cleanroom Clothing Systems; New Data on People as 

    Contamination Source in Clean Rooms with Regard to Airborne

    Particulates

    貝特.瑞穆勒,本特.龍維斯特 Berit Reinmuller and Bengt Ljungqvist


24、提高潔凈室服裝的效率

    Enhancing the Efficiency of Cleanroom Apparel

    羅伯特-斯派特 Robert Spector


25、顆粒潔凈度認證系統(tǒng)

    The Particle Cleanliness Validation System

    愛英.斯托斯,達拉斯.瑞維扎 Irving F. Stowers and Douglas L. Ravizza



應用Ⅱ:ISO/TC 209

Applications II: ISO/TC 209


26、使用非連續(xù)顆粒計數(shù)對安裝好的高效過濾器進行泄漏測試--實用性的調(diào)查

    Installed HEPA Filter Leak Testing by Using Discrete Particle 

    Counting-Investigation into Practicability

    洛塔o格爾,德克o斯坦尼斯切斯基 Lothar Gail and Dirk Stanischewski

過濾器的改進

Filter Update


27、聚α烯(PAO)氣溶膠對聚四氟乙烯介質(zhì)高效過濾器(試驗)壓差的作用效果

    The Effect of PAO Aerosol Challenge on the Differential Pressure of 

    a Gore-Tex Media HEPA (Experimental) Filter

    羅納德.羅伯特,代夫.阿那德 Ronald Roberts and Dave Arnold


28、帶高效過濾器的小型空氣潔凈器現(xiàn)場維修的消毒方法

    The Sterilizing Method for the Small Air Cleaner with HEPA Filter,

    When the Maintenance Is at the Site

    安迪.瓦特那勃,塔卡由基.塔那卡 Andy Watanabe and Takayuki Tanaka


29、使用晶片暴露方式及試驗性風機過濾器單元評估化學過濾器

    Evaluation of Chemical Filter Using Wafer Exposure Method and 

    Experimental FFU

    野中立夫、武田久男、飯川理行、多伊良俊一、藤本竹利

    Tatsuo Nonaka, Kikuo Takeda,Reiko Likawa, Toshikazu Taira, and Taketoshi Fujimoto


30、清除有機污染的陶瓷化學過濾器

    Ceramic Chemical Filter for Removal of Organic Contaminants

    坂田壯一郎、高橋秀遠、佐藤克三、古村秀遠

    Soichiro Sakata, Hideto Takahashi, Katsumi Sato, and Atsushi Takahashi


大學文章

University Presentation


31、半導體制造設施建設中的資源要求

    Resource Requirements for Construction of a Semiconductor

    Manufacturing Facility

    安諾哈夫o巴格瓦,貝爾克茲.鄂茲特米爾,阿蘭.恰西 

    Anubhav Bhargava, Balkiz Oztemir, and Allan D. Chasey


32、先進技術(shù)環(huán)境的規(guī)范、標準及符合規(guī)范的替代模式

    Codes and Standards and Alternate Code Compliance Model for Advanced 

    Technology Environments

    杰尼弗.瓊斯,阿蘭.洽西 

    Jennifer A. Jones and Allan D. Chasey


33、半導體設施程式化,減少設施建設費

    Benchmarking Semiconductor Facilities to Reduce Facility 

    Construction Costs

    杰夫o瓊斯,沙羅克,阿蘭洽西 

    Jeff Jones, Shawn O'Rourke, and Allan D. Chasey

ISO14644-1及-2與FED-STD-209E對比

Comparison of ISO14644-1 and -2 and FED-STD-209E 

34、通常對ISO14644-1及-2與FED-STD-209之間差別的誤解--對不了解的事會

    付出代價

    Common Misconceptions About the Differences Between ISO 14644-1 

    and -2 and FED-STD-209E-What You Don't Know Could Cost You

    羅伯特.米克 Robert Mielke


潔凈室運行Ⅱ

Cleanroom Operations II



35、關(guān)于懸浮顆粒計數(shù)器校準的討論

    Discussions About Calibration of Airborne Particle Counters

    劉俊杰,劉斌,朱能,王俊山 Junjie Liu, Bin Liu, Neng Zhu, and 

    Junshan Wang


36、潔凈工作臺空氣流速的均勻性和湍流度研究

    Study on Air Velocity Uniformity and Turbulivity Under Clean Bench

    劉俊杰,涂光備,馬久先,杜曉剛 Junjie Liu, Guangbei Tu, Jiuxian Ma, 

    and Xiaogang Du


37、醫(yī)藥業(yè)安全通風概念的風淋效率

    The Efficiency of Air Showers as a Safety Ventilation Concept in the 

    Pharmaceutical Industry

    拉斯,伊勃格,尤夫.庫格 Lars E. Ekberg and Ulf Kruger


38、乳膠手套過敏:摩托羅拉的經(jīng)驗

    Latex Glove Allergy: The Motorola Experience

    包勃.貝克 Bob Baker


39、潔凈室及防止生物擴散

    Cleanroom and Biocontainment 

    依米羅.莫埃 Emilio Moia


與污染控制相關(guān)的設計、測試及評估

Joint DTE/CC


內(nèi)部空氣質(zhì)量

Internal Air Quality


40、干燥空氣(環(huán)境)下自然氧化層在硅表面的生長

    Native Oxide Growth on a Silicon Surface Under a Dry Atmosphere

    上村哲,藤井正儀Satoshi Uemura and Masanori Fujii

41、過濾器編織材料穿透性研究

    Study on Permeability of Woven Filter Materials

    康永,張雨新,張忠國,孔新軍 Yong Kang, Yuxin Zhang, Zhongguo Zhang, 

    and Xinjun Kong


42、通風效率及測試方法的研究

    The Research About Ventilation Efficiency and Test Methods

    李津光,依德伍德.涂,涂光備 Jingguang Li, Edward Tu, and Guangbei Tu


43、影響通風室內(nèi)部濃度的因素分析

    The Analysis of Factors Affecting Concentration in the 

    Ventilation Room

    李津光,依德伍德.涂,涂光備 Jingguang Li, Wdward Tu, and Guangbei Tu


44、高效過濾器測試統(tǒng)計學上的顯著效率

    Statistically Significant Efficiency Testing of HEPA Filters

    王文立,菲利浦.文特斯 Wenli Wang and Philip J. Winters


設計、測試及評估 Design, Test & Evaluation


分析技術(shù)Ⅰ

Analysis Techniques I


45、以極端響應頻譜(ERS)及疲勞損傷頻譜(FDS)撰寫機械振動技術(shù)條件

    Writing a Mechanical Vibration Specification from ERS and FDS

    克瑞斯坦.拉蘭,米歇爾.保佑 Christian Lalanne and Michel Bozio


46、空氣波動造成的艙(氣)室側(cè)力近似值

    Approximation of Side Force Due to Aerodynamic Fluctuations on an 

    Airborne Store

    舍夫o浩斯通,魯林爾 Z. Sherf, P. Hopstone, and E. Lubliner


47、雙輪拖車拉桿的模態(tài)測量

    Modal Survey of Two-Wheeled Trailer Drawbar

    喬治.懷特 Geoge O. White


48、模態(tài)測量測試與振動評定測試:綜合方法

    Modal Survey Testing and Vibration Qualification Testing: The 

    Integrated Approach

    巴特.皮特斯,赫曼.萬.安沃爾,帕克.貴爾 Bart Peeters, Herman Van der 

    Auweraer, and Patrick Guillaume


49、動能導彈發(fā)射環(huán)境下惰性測量傳感器的振動隔絕

    Shock Isolation of Inertial Measurement Sensors Subjected to Kinetic 

    Energy Missile Launch Environments

    魯賽爾.戈恩爾,斯潘舍.哈德森 Russll S. Garner and Spencer L. Hudson

 

可靠性分析和測試

Reliability Analysis and Test 

50、熱聲聯(lián)合激勵下環(huán)境應力隔離頻譜模擬

    ESS Spectrum Tailoring with Combined Thermal and Acoustical 

    Excitation

    福朗科斯.拉夫爾,馬可.拉莫斯,夫瑞德瑞克.拉維爾 Francois Lafleur,

    Marc Thomas, and Frederic Laville


51、環(huán)境測試系統(tǒng)的新趨勢

    New Trends in Environmental Test Systems

    底特.豪斯 Dieter Haus


52、系統(tǒng)模擬及提高可靠性的故障樹狀分析

    Fault Tree Analysis for System Modeling and Reliability Growth 

    邁爾那.柯拉斯切 Milena Krasich 


53、另一種類型的故障源判定實例記載

    A Different Type of HALT Stimulus Case History

    喬治.漢德森,金柯爾 George Henderson and Kim Kral


54、自然環(huán)境下降低費用的全壽命測試

    Testing in Natural Environments for Total Ownership Cost Reduction

    羅格o威廉姆松 Roger L. Williamson


55、高加速應力隔離的實施步驟

    Implementation of the HASS Process

    吉爾伯特.巴斯汀 Gilbert Bastien


分析技術(shù)Ⅱ

Analysis Techniques II


56、隨機波型合成與脈沖計數(shù)

    Random Waveform Synthesis and Scaling

    漢斯o格容勃格 Hans S. Gruenberger


57、取樣率改變時振動響應頻譜的計算

    Calculation of the Shock Response Spectrum (SRS) with a Change in 

    Sampling Rate

    大衛(wèi).斯摩德 David O. Smallwood


58、多入多出(MIMO)隨機振動評定測試:算法及實際經(jīng)驗

    MIMO Random Vibration Qualification Testing: Algorithm and

    Practical Experience

    巴特.皮特及簡-德比爾 Bart Peeters and Jan Debille 

 

59、多激勵器測試應用:理論與實踐

    Multi-exciter Testing Application: Theory and Practice

    馬科恩.安德伍德 Marcos Underwood 


持續(xù)性--基礎與概念

Sustainability-Basic and Concepts


60、持續(xù)性--工業(yè)應用,選擇方案及市場機會

    Sustainability-Industrial Implementations, Options, and 

    Market Opportunities

    卡爾-夫德切吉根,赫爾馬-斯舒博特及托馬斯.赫斯 Karl-Friedrich Ziegahn,

    Hiltmar Schubert, and Thomas Hirth


61、瞄準持續(xù)性的新產(chǎn)品和新工藝

    New Products and Processes Aiming on Sustainability

    托馬斯.赫斯,赫爾馬-斯舒博特,卡爾-夫德切吉根 Thomas Hirth,

    Hiltmar Schubert, and Karl-Friedrich Ziegahn


62、持續(xù)性的獲得--如何彌補理念與實施間的差異

    Management of Subtainability-How to Overcome the Gap Between 

    Theoretical Concepts and Practical Implementation

    赫爾馬o斯舒博特,卡爾-夫德切吉根,托馬斯.赫斯 Hiltmar Schubert, 

    karl-Friedrich Ziegahn, and Thomas Hirth


63、合成木(包裝材料)樣塊(性能)測試

    Investigation on Composite Wood Blocks

    迪特.格勃爾 Dieter Greubel



溫度測試,數(shù)據(jù)與分析

Thermal Test, Date, and Analysis


64、以為是穩(wěn)定的?有關(guān)MIL-STD-810E圖501.3-1的新考慮

    Think It's Stabilized? New Considerations About Figure 501.3-1 of

    MIL-STD-810E

    馬科斯.都邁林,尤利.格羅森,托馬斯.拉德拉切 Markus Dumelin,

    Ueli Grossen, and Thomas Laederach


測試方法Ⅰ

Test Methods I


65、電子設備真實的或模擬的熱沖擊效果

    Effects of Real or Simulated Pyroshocks on Electronic Equipment

    亨瑞o格茲庫維克 Henri Grzeskowiak

  

66、數(shù)字式損傷儀記錄的飛行數(shù)據(jù)一瞥

    A Quick Look at Flight Data from a Digital Damage Dosimeter

    大衛(wèi)o本扎克,旦森.布朗,安杰拉.特格 David Banaszak, Dansen Brown, 

    and Angela Trego 

67、測試一致性的幾個問題

    Several Questions of Consistency in Our Testing

    茲夫.舍夫及菲利浦.蒙斯東 Zeev Sherf and Philip Hopstone


68、能源概算誤差與參數(shù)的不準確性之間的關(guān)系

    The relationship Between the Variance of Energy Estimates and the 

    Uncertainty Parameter

    大衛(wèi).斯馬烏德 David O.Smallwood


摸擬測試技術(shù)

Modeling/Simulation Test Technologies


69、大型復雜動力系統(tǒng)結(jié)構(gòu)模式的概率數(shù)字分析

    Probabilistic Numerical Analysis of Large, Complex, Structural 

    Dynamic System Models

    安杰.爾賓那和托馬斯.帕茲 Angel Urbina and Thomas L.Paez


70、對美國宇航局火星開拓者空間飛行器因發(fā)射聲音負載造成的高頻振動響應的能

    源統(tǒng)計分析預測及認證

    Prediction and Validation of High Frequency Vibration Responses of 

    NASA Mars Pathfinder Spacecraft Due to Acoustic Launch Load 

    Using Statistical Energy Analysis 

    霍-金 黃 Ho-Jin Hwang


測試設施

Test Facilities


71、介紹韓國宇航研究所使用的高強度聲音測試設施

    Introduction to a High-Intensity Acoustic Test Facility at Korea 

    Aerospace Research Inwstitute

    金永凱,金洪北,樸宋木,吳星現(xiàn),李松漢 Youngkey K.Kim, Hong-Bae Kim, 

    Sang-Mu Moon,Sung-Hyun Woo, and Sang-Seol Lee


72、振動/沖擊測試設施計劃

    Planning Your Vibration/Shock Test Facility

    威恩.圖汀 Wayne Tustin

 

 

測試方法Ⅱ

Test MethodsⅡ

73、造成機載系統(tǒng)的真正壽命與試驗室振動測試間差異的因素

    What Can Make the Difference Between the Real Life of an Airborne

    System and a Laboratory Vibration Test

    茲夫.舍夫及菲利浦.豪斯東 Zeev Sherg and Philip Hopstone


74、電子硬件的摸擬改進測試

    Simulation Improved Testing of Electronic Hardware

    米謝爾.奧斯曼 Michael Osterman


75、檢驗傳統(tǒng)的振動機器造成的振動與電動振動機造成的振動之間的功能性差別

    Examination of Functional Differences Between Shocks Delivered by 

    Conventional Shock Machines and Shocks Delivered by Electrodynamic

    Shakers

    大衛(wèi).格邦斯 David Gibbons


軍事項目中使用商業(yè)產(chǎn)品(COTS)的經(jīng)驗

COTS Experience on Military Programs


76、保證在空軍系統(tǒng)中成功地使用商業(yè)產(chǎn)品

    Ensuring Successful Implementation of Commercial Items in Air

    Force Systems

    肯尼斯.布朗 Kenneth M.Brown

 


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